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Proceedings of the 7th National Conference on Functional Materials and Applications (FMA 2010 E-BOOK)

Changsha,China,10.16-10.18,2010

ISBN: 978-1-935068-41-9 Scientific Research Publishing, USA

E-Book 2313pp Pub. Date: October 2010

Category: Chemistry & Materials Science

Price: $360

Title: Effect of Target-to-Substrate Distance and Sputtering Angle on Property of Cu and Fe Films
Source: Proceedings of the 7th National Conference on Functional Materials and Applications (FMA 2010 E-BOOK) (pp 1585-1588)
Author(s): Shan-shan Zhang, Department of Physics, Capital Normal University, Beijing 100048, China
Hai Wang, Department of Physics, Capital Normal University, Beijing 100048, China
Hong-wei Jiang, Department of Physics, Capital Normal University, Beijing 100048, China
Abstract: Cu and Fe monolarys were preperaed by dc magnetron sputtering on glass substrters with changing the target-to-substrate distance d and the sputtering angle β. Texture and grain size of samples were affected by changing d and β which were revealed by X-ray diffraction. Magnetic hysteresis loops examined by a vibration sample magnetometer (VSM) showed that texture and grain size would affect its magnetic.
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