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Proceedings of the 7th National Conference on Functional Materials and Applications (FMA 2010 E-BOOK)

Changsha,China,10.16-10.18,2010

ISBN: 978-1-935068-41-9 Scientific Research Publishing, USA

E-Book 2313pp Pub. Date: October 2010

Category: Chemistry & Materials Science

Price: $360

Title: Effects of Process Parameters on Field Emission Characteristics of AlN Thin Films Prepared by Pulsed Laser Deposition
Source: Proceedings of the 7th National Conference on Functional Materials and Applications (FMA 2010 E-BOOK) (pp 1548-1552)
Author(s): Song-ling Li, College of Materials Science and Engineering, Beijing University of Technology, Beijing, China
Ru-zhi Wang, College of Materials Science and Engineering, Beijing University of Technology, Beijing, China
Wei Zhao, College of Materials Science and Engineering, Beijing University of Technology, Beijing, China
Zhi-wei Song, College of Materials Science and Engineering, Beijing University of Technology, Beijing, China
Bo Wang, College of Materials Science and Engineering, Beijing University of Technology, Beijing, China
Hui Yan, College of Materials Science and Engineering, Beijing University of Technology, Beijing, China
Abstract: Aluminum nitride (AlN) thin films were prepared by pulsed laser deposition (PLD) at different substrate-target distance and substrate temperature. The field emission (FE) measurement showed that the FE current increases firstly and then decreases with increasing the substrate-target distance or substrate temperature. The films with the best FE properties appear at the substrate-target distance 5.5 cm or substrate temperature is 850 ℃. The substrate-target distance and substrate temperature determine the mobility of target particles on the substrate, therefore influence the surface morphology and microstructure, such as defects and compactness and so on, then effect greatly the FE properties. It suggests that for AlN films prepared by PLD, altering the process parameters properly is needed for modulating the kinetic energy of target particles on the substrate to get surface morphology and microstructure which is suitable for better FE.
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