Proceedings of the 7th National Conference on Functional Materials and Applications (FMA 2010 E-BOOK)

Changsha,China,10.16-10.18,2010

ISBN: 978-1-935068-41-9 Scientific Research Publishing, USA

E-Book 2313pp Pub. Date: October 2010

Category: Chemistry & Materials Science

Price: $360

Title: Observation of Etch Hills of ZnGeP2 Crystals
Source: Proceedings of the 7th National Conference on Functional Materials and Applications (FMA 2010 E-BOOK) (pp 1804-1806)
Author(s): Mao Ye, College of Material Science and Engineering, DongHua University ,ShangHai 200051 China
Xiu-ying Huan, College of Material Science and Engineering, DongHua University ,ShangHai 200051 China
Gang Peng, College of Material Science and Engineering, DongHua University ,ShangHai 200051 China
Yi-min Wang, College of Material Science and Engineering, DongHua University ,ShangHai 200051 China
Abstract: Iodine was saturated with the mixture of CH3COOH, HF and HNO3 with the volume ratio of 1:2:2 to dissolve into an etching solution. Then the ZnGeP2 wafers were etched in the etching solution for 20 min with ice-water bath and vibration by ultrasonic. The etch hills were clearly observed in Scanning Electron Microscope (SEM). The etch hills with certain degree of symmetry have certain height and size. The formation of the etch hills is theoretically analyzed. Results of the research have certain reference value on orientation, device-processing and improvement of growth technique for ZnGeP2 single crystals.
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