Author(s): |
Bang-wu Liu, Key Laboratory of Microelectronics Devices & Integrated Technology,Institute of Microelectronics, Chniese Academy of Sciences, Beijing, China Jie Liu, Key Laboratory of Microelectronics Devices & Integrated Technology,Institute of Microelectronics, Chniese Academy of Sciences, Beijing, China Chao-bo Li, Key Laboratory of Microelectronics Devices & Integrated Technology,Institute of Microelectronics, Chniese Academy of Sciences, Beijing, China Yang Xia, Key Laboratory of Microelectronics Devices & Integrated Technology,Institute of Microelectronics, Chniese Academy of Sciences, Beijing, China Ming-gang Wang, Key Laboratory of Microelectronics Devices & Integrated Technology,Institute of Microelectronics, Chniese Academy of Sciences, Beijing, China Wen-dong Wang, Key Laboratory of Microelectronics Devices & Integrated Technology,Institute of Microelectronics, Chniese Academy of Sciences, Beijing, China |
Abstract: |
In order to obtain some advanced functional materials with unique morphology for nanoelectronic/ microelectronic device applications or catalysis fields, a study on preparation of CuO with controlled morphologies under hydrothermal reaction condition was carried out. The experimental results showed that CuO nanosheet with wing-like morphology of cicada was obtained. Series of examinations were performed with TEM (transmission electron microscopy), XRD (X-ray diffraction), and so on. A chemical prototype sensor was constructed based on CuO nanosheet with wing-like morphology of cicada and highly sensitive quartz resonators. The gas-sensing behavior of the sensor to some common organic volatiles (such as toluene, formaldehyde, chloroform, alcohol vapor and other some common organic volatiles) operating at room temperature was investigated. The results showed that the CuO with unique structure morphology would have many important potential applications in chemical sensor to organic volatiles or catalysis fields.
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