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Proceedings of the 7th National Conference on Functional Materials and Applications (FMA 2010 E-BOOK)

Changsha,China,10.16-10.18,2010

ISBN: 978-1-935068-41-9 Scientific Research Publishing, USA

E-Book 2313pp Pub. Date: October 2010

Category: Chemistry & Materials Science

Price: $360

Title: The Progress of Si-Containing Diamond-Like Carbon
Source: Proceedings of the 7th National Conference on Functional Materials and Applications (FMA 2010 E-BOOK) (pp 89-94)
Author(s): Can Liu, School of Mechanical. Electronic and Control Engineering. Beijing Jiaotong University. Beijing 100044. China
Hui-qing Lan, School of Mechanical. Electronic and Control Engineering. Beijing Jiaotong University. Beijing 100044. China
Yang Wang, School of Mechanical. Electronic and Control Engineering. Beijing Jiaotong University. Beijing 100044. China
Abstract: The progress in Si-containing diamond-like carbon (Si-DLC) films is reviewed in this paper. Its deposition techniques. The effect of Si content on the microstructure, hardness and friction coefficient and its mechanisms are introduced in a detail. To help with the research in the future, the results was classified and summarized.
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