Fabrication of two-dimensional periodic TiO2 pillar arrays by multi-beam laser interference lithography

Hiroyo Segawa, Hiroaki Misawa

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DOI: 10.4236/ns.2009.13022                

Abstract

Two-dimensional (2D) periodic TiO2 pillar arrays, applicable to photonic crystals and micro-channels, were fabricated by direct patterning of a TiO2-organic hybrid material by multi-beam laser interference lithography and calcination of hybrid patterns. 2D periodic pillars of a TiO2– organic hybrid material were prepared by irra-diation with the interference pattern of femto-second laser beams and removal of the non- irradiated portions. Two types of periodic pillar arrays, standing pillars and top-gathering pillars (four pillars gathered at the top), were obtained, depending on laser irradiation conditions. After calcination of TiO2–organic hybrid pillars, TiO2 pillar arrays were obtained without collapse.

Keywords

Lithography, Capillary Force, Assembly

Conflicts of Interest

The authors declare no conflicts of interest.

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