"Deposition of a-CNx:H Films Using Uniform Supermagnetron Plasma under a Stationary Magnet Field"
written by Haruhisa Kinoshita, Syunsuke Yagi, Motoki Sakurai,
published by Journal of Modern Physics, Vol.4 No.5, 2013
has been cited by the following article(s):
  • Google Scholar
  • CrossRef