Numerical Calculations of Some Plasma Parameters of the Capacitively Coupled RF Discharge

HTML  XML Download Download as PDF (Size: 589KB)  PP. 591-598  
DOI: 10.4236/jmp.2014.58070    4,501 Downloads   5,955 Views  Citations

ABSTRACT

Numerical calculations by using a self-consistent model of the collisional sheath for the capacitively coupled RF discharge are our target. The results indicated that, at high pressure, the ohmic heating is usually the dominant heating mechanism in the discharge. The power dissipated in the sheath is calculated and compared with the measured data. Moreover, we indicated that, when the gas pressure is increased, the calculated dissipated power is decreased also while the measured input RF power is increased. Furthermore the sheath thickness of the capacitively coupled discharge is calculated and in the same order of the electron oscillation amplitude in the RF field, while the ionization mean free path is shorter than it.

Share and Cite:

Hassouba, M. , Galaly, A. and Rashed, U. (2014) Numerical Calculations of Some Plasma Parameters of the Capacitively Coupled RF Discharge. Journal of Modern Physics, 5, 591-598. doi: 10.4236/jmp.2014.58070.

Copyright © 2024 by authors and Scientific Research Publishing Inc.

Creative Commons License

This work and the related PDF file are licensed under a Creative Commons Attribution 4.0 International License.