Author(s)

Gasidit Panomsuwan, Nagahiro Saito

Department of Materials, Physics and Energy Engineering, Graduate School of Engineering, Nagoya, Japan.

Nb-doped SrTiO₃ (STNO) films were grown on (001)-oriented LaAlO₃ substrates by a reactive ion beam sputter deposition at various mixing ratios (OMRs) with a substrate temperature of 800^oC. The STNO films exhibited good crystallinity with an epitaxial orientation as characterized by high-resolution X-ray diffraction, grazing-incidence X-ray diffraction, and in-plane pole figure analysis. A decrease of out-of-plane and in-plane lattice constants was observed with an increase of OMR. The surface morphology of the STNO films showed a very dense fine-grain structure. The root-mean-square roughness was found to be increased as the OMR increased. Moreover, the elemental compositions of the STNO films were examined by X-ray photoelectron spectroscopy.

Nb-Doped SrTiO₃; Epitaxial Films; Crystal Structure; Ion Beam Sputter Deposition

G. Panomsuwan and N. Saito, "Influence of Oxygen to Argon Ratio on the Structural and Morphological Properties of Nb-Doped SrTiO₃ Epitaxial Films Grown by Reactive Ion Beam Sputter Deposition," Crystal Structure Theory and Applications, Vol. 2 No. 1, 2013, pp. 34-38. doi: 10.4236/csta.2013.21005.