Special Issue on Micro-Electro-Mechanical Systems Research and Application

Micro-Electro-Mechanical Systems (MEMS) are known as micro-machinesor micro-scale mechanical devices with elements made with technology adapted from Integrated Circuits (IC). MEMS (Micro Electro Mechanical Systems) are micro systems consisting of micro mechanical sensors, actuators and micro electronic circuits. It also refers to the technology of very small devices; it merges at the nano-scale into nano electromechanical systems (NEMS) and nanotechnology. It involves microelectronics, materials, mechanics, chemistry, mechanics and so on. MEMS range from simple beams and electrostatic gaps to higher level sensors and actuators，even including fluidic, magnetic, and thermal systems.

In this special issue, we intend to invite front-line researchers and authors to submit original research and review articles on exploring Micro-Electro-Mechanical Systems Research and Application. The special Issue focuses on the theory, design, properties, performance analysis and testing of Micro-Electro-Mechanical Systems.

Topics of interest include (but are not limited to) the following:

• The theory research of the Micro-Electro-Mechanical Systems(MEMS)
• MEMS modeling and simulation technology research
• MEMS and nanotechnology
• MEMS and integrated circuit
• MEMS and energy acquisition technology
• MEMS and photoelectronic technique
• MEMS and biotechnology
• Other research topics about the MEMS

Authors should read over the journal’s Author’s Guidelines carefully before submission, Prospective authors should submit an electronic copy of their complete manuscript through the journal Paper Submission System. According to the following timetable:

Please kindly notice that the “Special Issue’’ under your manuscript title is supposed to be specified and the research field “Special Issue — Micro-Electro-Mechanical Systems Research and Application” should be chosen during your submission.

Special Issue Editor

Guest Editor:

Dr. Rodrigo Sérgio Wiederkehr, University of Louisville, USA

For further questions or inquiries

Please contact Editorial Assistant at

eng@scirp.org